Scanning Electron Microscope Jeol JSM 35CF (year of installation: 1982).
Technical Data

Accelerating voltage: 1 to 30 kV
Filament: Harpin type W filament, DC heating
Probe current: 10^-12 to 10^-7 A
Detectors: SE, BSE

Specimen Stage

Working distance: 39, 15, 10 mm
X direction: 0 to 15 mm
Y direction: 0 to 25 mm
Z direction: +/- 1.5 mm
Rotation: 360^o
Tilt: 0 to 60^o

Vacuum System

Working pressure: 10^-4 Pa (10^-6 Torr)
Oil rotary pump: 100 l/min, 2 pumps
Oil diffusion pump: 400 l/sec, 1 pump

SEM Panel Control Software

The electronic unit is completely controlled via PC with the SEM panel.
Functions are:
- Start-up of complete system automatically or step by step with last used configuration
- Setting of high voltage, filament current and emission current
- Slow start-up high voltage and filament current
- Electronic fine alignment of beam axis with beam shift and beam tilt
- Independent condenser lens control
- Focusing with objective (coarse and fine)
- Setting of magnification and scan rotation
- Alignment of stigmator
- Adjustment of brightness and contrast
- Image shift
- Defined working distance for EDS
- Export of parameters (magnification, HV, WD) to image acquisition system

Digital Image Scanning System

- Max. resolution 16000 x 16000 pixel
- Fast scan, slow scan, X-ray mapping, line scan, point measurement
- Image processing
- DISS controls scan card with scan X and scan Y. Image signals are taken over by SE or BSE detector at preamplifier output.



Scanning Electron Microscope Jeol JSM 35CF with the new electronics.